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One key aspect to realizing the sequential release function is the practical realization of a coating layer that fulfills the requirements of a thickness of only a few micrometers (compare Figure 4), initial non-permeability, and, by its structure, support for crack initiation/propagation. As the coating cannot be applied over empty cavities, the introduction of the payloads needed to be integrated into the overall coating concept. Hence, each cavity was carefully filled using dissolved dyes mixed with poly(ethylene glycol) (PEG) via microinjection under microscopic control. The selection of PEG as filler was based on (i) the possibility to tailor the viscosity of the payload mixture depending on PEG molecular weight and (ii) good aqueous solubility, while other types of fillers may be selected as long as they do not hinder cavity deformation by local strain. Successful cavity filling via the strategy employed here was confirmed by optical microscopy (Figure 5A).
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